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Crystallographic properties of grain size-controlled polycrystalline silicon thin films deposited on alumina substrate

  1. 1.
    OGANE, A., HONDA, Shinya, URAOKA, Y., FUYUKI, T., FEJFAR, Antonín, KOČKA, Jan. Crystallographic properties of grain size-controlled polycrystalline silicon thin films deposited on alumina substrate. Journal of Crystal Growth. 2009, 311(3), 789-793. ISSN 0022-0248. E-ISSN 1873-5002. Available: doi: 10.1016/j.jcrysgro.2008.09.098
Number of the records: 1  

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