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The interaction of the supersonic plasma - jet with substrate in the RF plasma-chemical reactor
- 1.ŠÍCHA, M., HUBIČKA, Z., TICHÝ, M., NOVÁK, Miloš, SOUKUP, Ladislav, JASTRABÍK, Lubomír, BEHNKE, J. F., KAPIČKA, V., KAPOUN, K., ŠERÝ, M. The interaction of the supersonic plasma - jet with substrate in the RF plasma-chemical reactor. Contributions to Plasma Physics. 1996, 36(5), 605-611. ISSN 0863-1042. E-ISSN 1521-3986.
Number of the records: 1