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White-light interferometry without depth scan
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SYSNO ASEP 0501005 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title White-light interferometry without depth scan Author(s) Pavlíček, Pavel (FZU-D) RID, ORCID, SAI
Mikeska, Erik (FZU-D)Number of authors 2 Article number 109760O Source Title 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics. - Bellingham : SPIE, 2018 / Zemánek P. - ISSN 0277-786X - ISBN 978-15-106-2607-2 Pages s. 1-5 Number of pages 5 s. Publication form Online - E Action Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics /XXI./ Event date 03.09.2018 - 07.09.2018 VEvent location Lednice Country CZ - Czech Republic Event type WRD Language eng - English Country US - United States Keywords white-light interferometry ; optical metrology ; rough surface ; fiber stretcher ; electrically tunable lens Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Electrical and electronic engineering R&D Projects GA17-05547S GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 UT WOS 000455324600023 EID SCOPUS 85059400179 DOI https://doi.org/10.1117/12.2517877 Annotation White-light interferometry is an established and proven method for the measurement of the shape of objects. It is able to measure the shape of objects with both smooth and rough surface. However, white-light interferometry suffers from some limitations. One of them is the necessity of the depth scan (the measured object is mechanically moved relative to the measuring device). We present an optical 3D sensor based on white-light interferometry that can measure the shape of objects without the mechanical depth scan. The output of a fiber optic interferometer is used as the light source for the measuring interferometer. An optical modulator inserted into one arm of the fiber optic interferometer changes the optical path difference between the interferometer arms so that the spectrum at the output is periodic. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2019
Number of the records: 1