White-light interferometry without depth scan

0501005 - FZÚ 2019 RIV US eng C - Conference Paper (international conference)
Pavlíček, Pavel - Mikeska, Erik
White-light interferometry without depth scan.
21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics. Bellingham: SPIE, 2018 - (Zemánek, P.), s. 1-5, č. článku 109760O. Proceedings of SPIE, 10976. ISBN 978-15-106-2607-2. ISSN 0277-786X.
[Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics /XXI./. Lednice (CZ), 03.09.2018-07.09.2018]
R&D Projects: GA ČR(CZ) GA17-05547S
Institutional support: RVO:68378271
Keywords : white-light interferometry * optical metrology * rough surface * fiber stretcher * electrically tunable lens
OECD category: Electrical and electronic engineering
http://spie.org/Publications/Proceedings/Paper/10.1117/12.2517877

White-light interferometry is an established and proven method for the measurement of the shape of objects. It is able to measure the shape of objects with both smooth and rough surface. However, white-light interferometry suffers from some limitations. One of them is the necessity of the depth scan (the measured object is mechanically moved relative to the measuring device). We present an optical 3D sensor based on white-light interferometry that can measure the shape of objects without the mechanical depth scan. The output of a fiber optic interferometer is used as the light source for the measuring interferometer. An optical modulator inserted into one arm of the fiber optic interferometer changes the optical path difference between the interferometer arms so that the spectrum at the output is periodic.
Permanent Link: http://hdl.handle.net/11104/0293033