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Magnetic-field-induced Actuation of Ni-Mn-Ga Micropillars
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SYSNO ASEP 0496232 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Magnetic-field-induced Actuation of Ni-Mn-Ga Micropillars Author(s) Musiienko, D. (FI)
Saren, A. (FI)
Sozinov, A. (FI)
Ullakko, K. (FI)
Straka, Ladislav (FZU-D) ORCID
Klimša, Ladislav (FZU-D) ORCID
Heczko, Oleg (FZU-D) RID, ORCIDNumber of authors 7 Source Title Proceedings International Conference on New Actuators /16./. - Bremen : VDE VERLAG, 2018 / Borgmann H. - ISBN 978-3933339300 Pages s. 1-642 Number of pages 3 s. Publication form Print - P Action ACTUATOR 2018 - International Conference on New Actuators /16./ Event date 25.06.2018 - 27.06.2018 VEvent location Bremen Country DE - Germany Event type WRD Language eng - English Country DE - Germany Keywords Ferromagnetic shape ; MEMS ; Micro-magneto-mechanical systems Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) Institutional support FZU-D - RVO:68378271 Annotation We report on magnetic-field-induced actuation of Ni50Mn28.5Ga21.5 single crystalline micropillars. Focused ion beam (FIB) milling technology was used to machine 45x45x120 micrometer3 cuboid pillars. The removal of about 2 µm of ion-beam-damaged surface layer enabled magnetic field actuation in pillars. Our results demonstrate the feasibility of manufacturing of microns-sized magnetic shape memory actuators by using Xe plasma source FIB technique.
Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2019
Number of the records: 1