Deposition and forming of nanoparticles on the hydrogenated silicon thin films

Stuchlík, Jiří; Fajgar, Radek; Kupčík, Jaroslav; Stuchlíková, The-Ha; Ledinský, Martin; Čermák, Jan; Píč, Vlastimil; Remeš, Zdeněk; Mortet, Vincent; Shklyaev, A.A.; Volodin, V.

Number of the records: 1

Deposition and forming of nanoparticles on the hydrogenated silicon thin films

1.

SYSNO ASEP	0483632
Document Type	A - Abstract
R&D Document Type	O - Ostatní
Title	Deposition and forming of nanoparticles on the hydrogenated silicon thin films
Author(s)	Stuchlík, Jiří (FZU-D)_{RID, ORCID} Fajgar, Radek (UCHP-M)_{RID, ORCID, SAI} Kupčík, Jaroslav (UCHP-M)_{RID, ORCID, SAI} Stuchlíková, The-Ha (FZU-D)_{RID, ORCID} Ledinský, Martin (FZU-D)_{RID, ORCID, SAI} Čermák, Jan (FZU-D)_{RID, SAI, ORCID} Píč, Vlastimil (FZU-D) Remeš, Zdeněk (FZU-D)_{RID, ORCID} Mortet, Vincent (FZU-D)_{RID, ORCID} Shklyaev, A.A. (RU) Volodin, V. (RU)
Number of authors	11
Source Title	E-MRS 2017 Spring Meeting and Exhibit. - Strasbourg : European Materials Research Society, 2017
Number of pages	1 s.
Publication form	Online - E
Action	E-MRS 2017 Spring Meeting and Exhibit
Event date	22.05.2017 - 26.05.2017
VEvent location	Strasbourg
Country	FR - France
Event type	WRD
Language	eng - English
Country	FR - France
Keywords	nanoparticles ; hydrogen ; silicon
Subject RIV	BM - Solid Matter Physics ; Magnetism
OECD category	Condensed matter physics (including formerly solid state physics, supercond.)
Subject RIV - cooperation	Institute of Chemical Process Fundamentals Institute of Chemical Process Fundamentals - Physical ; Theoretical Chemistry
R&D Projects	GC16-10429J GA ČR - Czech Science Foundation (CSF)
	LM2015087 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	GA13-31783S GA ČR - Czech Science Foundation (CSF)
Institutional support	FZU-D - RVO:68378271 ; UCHP-M - RVO:67985858
Annotation	Thin films prepared by deposition of nanoparticles on the surface of hydrogenated silicon were studied for optoelectronic applications. Three techniques were used to prepare the nanoparticles – high vacuum evaporation resp. MBE and ArF laser ablation. Broad range of deposition conditions (e.g. precursor pressure, temperature and laser fluence) was studied. Interesting and utilizable optoelectronic properties were observed at multilayered films composed of different nanoparticles. Research was focused on preparation of magnesium silicide, calcium silicide, germanium and tin nanoparticles. The nanoparticles were deposited immediately after deposition of the hydrogenated silicon layer by plasma enhanced CVD without exposing the underlying layer to ambient air. The deposited material was characterized by means of Raman and photoelectron spectroscopy techniques. Transmission, scanning and atomic force microscopies were used for more detailed description of the prepared layers.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2018

Number of the records: 1