Deposition and forming of nanoparticles on the hydrogenated silicon thin films

STUCHLÍK, J., FAJGAR, R., KUPČÍK, J., STUCHLÍKOVÁ, T.-H., LEDINSKÝ, M., ČERMÁK, J., PÍČ, V., REMEŠ, Z., MORTET, V., SHKLYAEV, A.A., VOLODIN, V. Deposition and forming of nanoparticles on the hydrogenated silicon thin films. In: E-MRS 2017 Spring Meeting and Exhibit. Strasbourg: European Materials Research Society, 2017.