Fabrication of 2D periodic structures patterned on 3D surfaces by laser lithography

0483207 - FZÚ 2018 RIV SK eng C - Conference Paper (international conference)
Lettrichová, I. - Goraus, M. - Pudiš, D. - Laurencikova, A. - Novak, J. - Urbancova, P. - Varga, Marián - Ižák, Tibor - Kromka, Alexander
Fabrication of 2D periodic structures patterned on 3D surfaces by laser lithography.
Extended Abstract Book of international conference Progress in Applied Surface - SURFINT-SREN V. Bratislava: Comenius University, 2017 - (Pinčík, E.), s. 82-83. ISBN 978-80-2234411-1.
[Progress in Applied Surface, Interface and Thin Film Science 2017. Florence (IT), 20.11.2017-23.11.2017]
R&D Projects: GA MŠMT 7AMB17AT036
Institutional support: RVO:68378271
Keywords : interference laser lithography * diamond * GaP * SEM * CVD
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

We prepared structures on two different surfaces: GaP cones grown by MOVPE and polycrystalline diamond films were deposited on Si using MWCVD. For the photoresist deposition we used technique of standard spin-coating deposition and deposition from water level. Quality of prepared structures were examined by confocal laser microscope and SEM. GaP microcones grown by MOVPE were formed on substrate and were patterned by interference laser lithography. Different 2D structures were patterned in the GaP microcones surfaces. Similar technique was used for 2D structure fabrication on diamond . Uniformity of diamond surface strongly depended on the homogeneous photoresist layer deposition which was experimentally optimized using different photoresist deposition techniques. In the next process, the selective deposition of metal nanoparticles in the patterned surface is aimed. This should lead to uniformly distributed nanostructures on 3D surfaces for plasmonic or SERS applications.
Permanent Link: http://hdl.handle.net/11104/0278587