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Fast white-light interferometry with Hilbert transform evaluation
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SYSNO ASEP 0478762 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Fast white-light interferometry with Hilbert transform evaluation Author(s) Pavlíček, Pavel (FZU-D) RID, ORCID, SAI
Mikeska, Erik (FZU-D)Number of authors 2 Article number 101420Y Source Title 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics. - Bellingham : SPIE, 2016 / Mullerová J. ; Senderáková D. ; Ladányi L. ; Scholtz L. - ISSN 0277-786X - ISBN 978-1-5106-0733-0 Pages s. 1-7 Number of pages 7 s. Publication form Online - E Action 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics (SCPOC) Event date 05.09.2016 - 09.09.2016 VEvent location Jasna Country SK - Slovakia Event type WRD Language eng - English Country US - United States Keywords white-light interferometry ; Hilbert transform ; undersampling Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Electrical and electronic engineering R&D Projects GA13-12301S GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 UT WOS 000393152700033 EID SCOPUS 85011664469 DOI 10.1117/12.2261951 Annotation White-light interferometry is an established method for the measurement of the shape of objects. Unlike to the classical interferometry, white-light interferometry can measure the shape of objects with rough surface. A major disadvantage of white-light interferometry is the low scanning speed and thus the long measurement time. This disadvantage can be overcome by a strong undersampling and Hilbert transform evaluation. We propose a system that measures the shape of objects with rough surface with the scanning speed of more than 100 mu m/s with the standard frame rate of 25 fps. The measurement uncertainty is comparable with that obtained with standard design. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2018
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