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Direct measurements of the ion flux at the substrate in reactive HiPIMS
- 1.ČADA, Martin, LUNDIN, D., HUBIČKA, Zdeněk. Direct measurements of the ion flux at the substrate in reactive HiPIMS. In: International Conference on Plasma Surface Engineering. Abstracts. ( PSE 2016 ) /15./. Braunschweig: European Joint Committee on Plasma and Ion Surface Engineering (EJC / PISE), 2016, s. 415-415.
Number of the records: 1