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RIR MAPLE Procedure for Deposition of Carbon Rich Si/C/H Films
- 1.0424399 - ÚCHP 2014 RIV NL eng J - Journal Article
Dřínek, Vladislav - Strašák, Tomáš - Novotný, F. - Fajgar, Radek - Bastl, Zdeněk
RIR MAPLE Procedure for Deposition of Carbon Rich Si/C/H Films.
Applied Surface Science. Roč. 292, FEB 15 (2014), s. 413-419. ISSN 0169-4332. E-ISSN 1873-5584
R&D Projects: GA ČR GA13-25747S
Grant - others:MŠMT(CZ) RVO6840770
Institutional support: RVO:67985858 ; RVO:61388955
Keywords : MAPLE * dendrimer * SiC * DLC * cross-kinking
Subject RIV: CA - Inorganic Chemistry
Impact factor: 2.711, year: 2014
Permanent Link: http://hdl.handle.net/11104/0230464File Download Size Commentary Version Access 0424399.pdf 3 6.4 MB Author’s postprint open-access
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