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About the information depth of backscattered electron imaging

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    0477097 - ÚPT 2018 RIV GB eng J - Journal Article
    Piňos, Jakub - Mikmeková, Šárka - Frank, Luděk
    About the information depth of backscattered electron imaging.
    Journal of Microscopy. Roč. 266, č. 3 (2017), s. 335-342. ISSN 0022-2720
    Institutional support: RVO:68081731
    Keywords : backscattered electrons * information depth * penetration of electrons
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    OBOR OECD: Materials engineering
    Impact factor: 1.693, year: 2017

    The information depth of imaging with backscattered electrons in the scanning electron microscope was measured directly by comparison of a planar view of a steel sample with buried precipitates with an image of a section cut through precipitates by means of a Focused Ion Beam attachment. The information depth was determined across the electron energy range of units of keV and the results were compared with information depths calculated from two published equations and simulated using widely available Monte Carlo-based software. Recommendations are given for routine estimations of BSE information depths.
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