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Ellipsometry and LIMM investigations of the interaction between PZT thin films and platinum electrodes and air
- 1.0133423 - FZU-D 20010275 RIV GB eng J - Journal Article
Deineka, Alexander - Glinchuk, M. D. - Jastrabík, Lubomír - Suchaneck, G. - Sandner, T. - Gerlach, G.
Ellipsometry and LIMM investigations of the interaction between PZT thin films and platinum electrodes and air.
Ferroelectrics. Roč. 254, - (2001), s. 205-211. ISSN 0015-0193
R&D Projects: GA ČR GA202/00/1425
Institutional research plan: CEZ:AV0Z1010914
Keywords : ferroelecric film * depth profile * interface interaction
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.471, year: 2001
In this work we present new results of investigation of PbZr0.235Ti0.765O3 (PTZ) films deposited onto Si/SiO2/adhesion layer/(111) Pt substrate by RF sputtering. Optical constants of PZT films, refraction index depth profile and polarization profile were determined.
Permanent Link: http://hdl.handle.net/11104/0031392