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Optical and transport properties of ZnO thin films prepared by reactive pulsed mid-frequency sputtering combined with RF ECWR plasma
- 1.REMEŠ, Zdeněk, HUBIČKA, Zdeněk, HUBÍK, Pavel. Optical and transport properties of ZnO thin films prepared by reactive pulsed mid-frequency sputtering combined with RF ECWR plasma. Nanomaterials. 2025, 15(8), 590. ISSN 2079-4991. E-ISSN 2079-4991. Available: https://doi.org/10.3390/nano15080590.
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