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Digital pixel test structures implemented in a 65 nm CMOS process
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SYSNO ASEP 0582691 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Digital pixel test structures implemented in a 65 nm CMOS process Author(s) Aglieri Rinella, G. (CH)
Andronic, A. (DE)
Antonelli, M. (IT)
Aresti, M. (IT)
Isakov, Artem (UJF-V) ORCID, SAI
Kotliarov, Artem (UJF-V) ORCID, SAI
Křížek, Filip (UJF-V) RID, ORCID, SAINumber of authors 52 Article number 168589 Source Title Nuclear Instruments & Methods in Physics Research Section A. - : Elsevier - ISSN 0168-9002
Roč. 1056, NOV (2023)Number of pages 13 s. Publication form Print - P Language eng - English Country NL - Netherlands Keywords ALICE detector ; Monolithic active pixel sensors ; Solid state detectors OECD category Nuclear physics R&D Projects LM2023040 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Open access Institutional support UJF-V - RVO:61389005 UT WOS 001155138600001 EID SCOPUS 85171618072 DOI 10.1016/j.nima.2023.168589 Annotation The ALICE ITS3 (Inner Tracking System 3) upgrade project and the CERN EP R&D on monolithic pixel sensors are investigating the feasibility of the Tower Partners Semiconductor Co. 65 nm process for use in the next generation of vertex detectors. The ITS3 aims to employ wafer-scale Monolithic Active Pixel Sensors thinned down to 20–40 µm and bent to form truly cylindrical half barrels. Among the first critical steps towards the realisation of this detector is to validate the sensor technology through extensive characterisation both in the laboratory and with in-beam measurements. The Digital Pixel Test Structure (DPTS) is one of the prototypes produced in the first sensor submission in this technology and has undergone a systematic measurement campaign whose details are presented in this article. The results confirm the goals of detection efficiency and non-ionising and ionising radiation hardness up to the expected levels for ALICE ITS3 and also demonstrate operation at ＋20 °C and a detection efficiency of 99% for a DPTS irradiated with a dose of 1015 1 MeV neq cm-2. Furthermore, spatial, timing and energy resolutions were measured at various settings and irradiation levels. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2024 Electronic address https://doi.org/10.1016/j.nima.2023.168589
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