Number of the records: 1
Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method
- 1.
SYSNO ASEP 0579923 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method Author(s) Tang, X. (DE)
Chappa, G. K. (DE)
Viera, L. (CZ)
Holeňa, Martin (UIVT-O) SAI, RID
Dropka, N. (DE)Source Title Crystals. - : MDPI - ISSN 2073-4352
Roč. 13, č. 12 (2023), s. 1659Number of pages 16 s. Publication form Online - E Language eng - English Country CH - Switzerland Keywords LEC growth ; gallium arsenide ; CFD ; regression tree OECD category Computer sciences, information science, bioinformathics (hardware development to be 2.2, social aspect to be 5.8) Method of publishing Open access Institutional support UIVT-O - RVO:67985807 UT WOS 001130951800001 EID SCOPUS 85180658215 DOI 10.3390/cryst13121659 Annotation In this study, an axisymmetric Czochralski furnace model for the LEC growth of gallium arsenide is presented. We produced 88 datasets through computational fluid dynamics simulations. Among the many parameters that affect crystal growth, a total of 13 input parameters were selected, including the geometry and material parameters of the hot zone (crucible, heaters, radiation shield, and crystal), as well as the process parameters (such as pulling and rotation rates, heating power, etc.). Voronkov criteria (v/Gn), interface deflection, and the average interface temperature gradient were selected as the output parameters. We carried out a correlation analysis between the variables and used decision trees to study the impact of the 13 input variables on the output variables. The results indicated that in the growth of gallium arsenide, the main factor affecting interface deflection and the average interface thermal gradients is the crucible rotation rate. For v/Gn, it is the pulling rate. Workplace Institute of Computer Science Contact Tereza Šírová, sirova@cs.cas.cz, Tel.: 266 053 800 Year of Publishing 2024 Electronic address https://doi.org/10.3390/cryst13121659
Number of the records: 1