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Robust Local Thickness Estimation of Sub-Micrometer Specimen by 4D-STEM
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SYSNO ASEP 0579321 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Robust Local Thickness Estimation of Sub-Micrometer Specimen by 4D-STEM Author(s) Skoupý, Radim (UPT-D) RID, ORCID, SAI
Boltje, D. B. (NL)
Šlouf, Miroslav (UMCH-V) RID, ORCID
Mrázová, Kateřina (UPT-D) SAI, ORCID, RID
Láznička, Tomáš (UPT-D) ORCID, RID, SAI
Taisne, C. M. (NL)
Krzyžánek, Vladislav (UPT-D) RID, ORCID, SAI
Hoogenboom, J. P. (NL)
Jakobi, A. J. (NL)Number of authors 9 Article number 2300258 Source Title Small Methods. - : Wiley - ISSN 2366-9608
Roč. 7, č. 9 (2023)Number of pages 11 s. Publication form Online - E Language eng - English Country US - United States Keywords 4D-STEM ; cryo-ET ; FIB milling ; TEM analysis Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Electrical and electronic engineering R&D Projects GA21-13541S GA ČR - Czech Science Foundation (CSF) TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Method of publishing Open access Institutional support UPT-D - RVO:68081731 ; UMCH-V - RVO:61389013 UT WOS 000997748800001 EID SCOPUS 85160667652 DOI 10.1002/smtd.202300258 Annotation A quantitative four-dimensional scanning transmission electron microscopy (4D-STEM) imaging technique (q4STEM) for local thickness estimation across amorphous specimen such as obtained by focused ion beam (FIB)-milling of lamellae for (cryo-)TEM analysis is presented. This study is based on measuring spatially resolved diffraction patterns to obtain the angular distribution of electron scattering, or the ratio of integrated virtual dark and bright field STEM signals, and their quantitative evaluation using Monte Carlo simulations. The method is independent of signal intensity calibrations and only requires knowledge of the detector geometry, which is invariant for a given instrument. This study demonstrates that the method yields robust thickness estimates for sub-micrometer amorphous specimen using both direct detection and light conversion 2D-STEM detectors in a coincident FIB-SEM and a conventional SEM. Due to its facile implementation and minimal dose reauirements, it is anticipated that this method will find applications for in situ thickness monitoring during lamella fabrication of beam-sensitive materials. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2024 Electronic address https://onlinelibrary.wiley.com/doi/10.1002/smtd.202300258
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