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Ultrafast infrared laser crystallization of amorphous Ge films on glass substrates

  1. 1.
    SYSNO0577936
    TitleUltrafast infrared laser crystallization of amorphous Ge films on glass substrates
    Author(s) Cheng, Y. (RU)
    Bulgakov, Alexander (FZU-D) ORCID
    Bulgakova, Nadezhda M. (FZU-D) ORCID
    Beránek, Jiří (FZU-D)
    Zukerstein, Martin (FZU-D) ORCID
    Milekhin, I.A. (RU)
    Popov, A. A. (RU)
    Volodin, V.A. (RU)
    Source Title Micromachines. Roč. 14, č. 11 (2023). - : MDPI
    Article number2048
    Document TypeČlánek v odborném periodiku
    Grant CZ.02.1.01/0.0/0.0/15_003/0000445, XE - EU countries
    EF15_003/0000445 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    Institutional supportFZU-D - RVO:68378271
    Languageeng
    CountryCH
    Keywords germanium * thin films * ultrashort infrared laser annealing * crystallization * Raman spectroscopy * nonrefractory substrates
    URLhttps://hdl.handle.net/11104/0347013
    Permanent Linkhttps://hdl.handle.net/11104/0347013
    FileDownloadSizeCommentaryVersionAccess
    0577936.pdf05.5 MBCC licencePublisher’s postprintopen-access
     
Number of the records: 1  

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