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Ultrafast infrared laser crystallization of amorphous Ge films on glass substrates
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SYSNO ASEP 0577936 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Ultrafast infrared laser crystallization of amorphous Ge films on glass substrates Author(s) Cheng, Y. (RU)
Bulgakov, Alexander (FZU-D) ORCID
Bulgakova, Nadezhda M. (FZU-D) ORCID
Beránek, Jiří (FZU-D)
Zukerstein, Martin (FZU-D) ORCID
Milekhin, I.A. (RU)
Popov, A. A. (RU)
Volodin, V.A. (RU)Number of authors 8 Article number 2048 Source Title Micromachines. - : MDPI
Roč. 14, č. 11 (2023)Number of pages 14 s. Language eng - English Country CH - Switzerland Keywords germanium ; thin films ; ultrashort infrared laser annealing ; crystallization ; Raman spectroscopy ; nonrefractory substrates Subject RIV BH - Optics, Masers, Lasers OECD category Optics (including laser optics and quantum optics) R&D Projects EF15_003/0000445 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Open access Institutional support FZU-D - RVO:68378271 UT WOS 001113669700001 EID SCOPUS 85178109648 DOI 10.3390/mi14112048 Annotation Amorphous germanium films on nonrefractory glass substrates were annealed by ultrashort near-infrared (1030 nm, 1.4 ps) and mid-infrared (1500 nm, 70 fs) laser pulses. Crystallization of germanium irradiated at a laser energy density (fluence) range from 25 to 400 mJ/cm2 under single-shot and multishot conditions was investigated using Raman spectroscopy. The dependence of the fraction of the crystalline phase on the fluence was obtained for picosecond and femtosecond laser annealing. The regimes of almost complete crystallization of germanium films over the entire thickness were obtained (from the analysis of Raman spectra with excitation of 785 nm laser). The possibility of scanning laser processing is shown, which can be used to create films of micro- and nanocrystalline germanium on flexible substrates. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2024 Electronic address https://hdl.handle.net/11104/0347013
Number of the records: 1