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Design, fabrication, and characterization of picowell arrays on cyclic olefin copolymer surfaces generated with a 10.5MeV N.sup.4+./sup. ion microbeam

  1. 1.
    Banyasz, I., Rajta, I., Havránek, V., Macková, A., Laki, A. J., Kellermayer, M. S. Z., Szittner, Z., Kurunczi, S., Novak, S., Szekacs, I., Horvath, R., Fried, M., Nagy, G. U. L. Design, fabrication, and characterization of picowell arrays on cyclic olefin copolymer surfaces generated with a 10.5MeV N4+ ion microbeam. Applied Physics Letters. 2023, 123(5), 053701. ISSN 0003-6951. E-ISSN 1077-3118. Available: https://doi.org/10.1063/5.0155681.
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