Influence of the magnetic field on the extension of the ionization region in high power impulse magnetron sputtering discharges

ANTUNES, V.G., RUDOLPH, M., KAPRAN, Anna, HAJIHOSEINI, H., RAADU, M.A., BRENNING, N., GUDMUNDSSON, J.T., LUNDIN, D., MINEA, T. Influence of the magnetic field on the extension of the ionization region in high power impulse magnetron sputtering discharges. Plasma Sources Science & Technology. 2023, 32(7), 075016. ISSN 0963-0252. E-ISSN 1361-6595. Available: doi: 10.1088/1361-6595/ace847.