Number of the records: 1

Contamination mitigation strategy for SEMs

SYSNO ASEP	0571242
Document Type	O - Others
R&D Document Type	Others
Title	Contamination mitigation strategy for SEMs
Author(s)	Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Materna Mikmeková, Eliška (UPT-D)_{ORCID, RID, SAI} Konvalina, Ivo (UPT-D)_{RID, ORCID, SAI}
Year of issue	2022
Language	eng - English
Country	CZ - Czech Republic
Keywords	contamination ; low energy electron microscopy ; 2D crystals
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
OECD category	Materials engineering
R&D Projects	TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
Institutional support	UPT-D - RVO:68081731
Annotation	Müllerová, I., Materna-Mikmeková, E., Konvalina, I. Contamination mitigation strategy for SEMs. TN01000008/30-V003. 2022. Contamination in modern electron microscopy is at the forefront of interest and mainly concerns the deposition of a carbon based film on the surface from adsorbed hydrocarbons. The report deals with effects describing the growth/removal of contamination caused by electron irradiation and to describe in detail the influence of electron beam parameters on the balance between deposition and desorption processes.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2023

Number of the records: 1