Overview of Polyethylene Terephthalate Foils Patterned Using 10 MeV Carbon Ions for Realization of Micromembranes

0570595 - ÚJF 2024 RIV CH eng J - Journal Article
Cutroneo, Mariapompea - Havránek, Vladimír - Macková, Anna - Malinský, Petr - Mikšová, Romana - Ceccio, Giovanni - Ando, L. - Michalcová, A.
Overview of Polyethylene Terephthalate Foils Patterned Using 10 MeV Carbon Ions for Realization of Micromembranes.
Micromachines. Roč. 14, č. 2 (2023), č. článku 284. E-ISSN 2072-666X
R&D Projects: GA ČR(CZ) GA22-10536S; GA MŠMT EF16_013/0001812
Institutional support: RVO:61389005
Keywords : ion lithography * membrane * polyethylene teraphthalate * simulation * STIM
OECD category: Nuclear physics
Impact factor: 3.4, year: 2022
Method of publishing: Open access
https://doi.org/10.3390/mi14020284
Permanent Link: https://hdl.handle.net/11104/0341896