X-ray fluorescence imaging for determining layer thicknesses

0567887 - ÚTAM 2024 RIV eng P - Patent Document
Vavřík, Daniel
X-ray fluorescence imaging for determining layer thicknesses.
2023. Owner: Ústav teoretické a aplikované mechaniky AV ČR, v. v. i. Date of the patent acceptance: 04.01.2023. Patent Number: EP3828534. Territorial Protection: evropský patent podle Evropské patentové úmluvy .
R&D Projects: GA MŠMT(CZ) EF16_019/0000766
Institutional support: RVO:68378297
Keywords : stratigraphy * in-situ X-ray methods
OECD category: Nuclear related engineering
https://worldwide.espacenet.com/patent/search/family/074099624/publication/EP3828534A1?q=pn%3DEP3828534A1

RTG profilometer targets the inspection of a layered structure deposited onto a massive substrate. The investigated object is irradiated by a planar, sharp X-ray beam passing over the surface at an acute angle. The scattered and XRF photons are recorded by a pinhole camera equipped with a semiconductor pixelated detector. Measurement of the layer thicknesses with micrometric precision is obtained by analyzing changes in the signal produced at the sharp edge of the X-ray beam. The device primarily targets the investigation of medieval wooden panel paintings based on polychromy but it can more general.
Permanent Link: https://hdl.handle.net/11104/0339145