Silicon surface patterning by regular stripes of laser-induced periodic surface structures

Number of the records: 1

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SYSNO	0561604
Title	Silicon surface patterning by regular stripes of laser-induced periodic surface structures
Author(s)	Sládek, Juraj (FZU-D)_ORCID Levy, Yoann (FZU-D)_{ORCID, RID} Derrien, Thibault (FZU-D)_ORCID Bryknar, Z. (CZ) Bulgakova, Nadezhda M. (FZU-D)_{ORCID, RID}
Corespondence/senior	Sládek, Juraj - Korespondující autor
Source Title	Applied Surface Science. Roč. 605, Dec. (2022). - : Elsevier
Article number	154664
Document Type	Článek v odborném periodiku
Grant	CZ.02.1.01/0.0/0.0/15_003/0000445, XE - EU countries
	EF15_003/0000445 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	NL
Keywords	femtosecond laser processing * laser beam scanning * low spatial frequency LIPSS * LSFL * laser-induced amorphization
URL	https://doi.org/10.1016/j.apsusc.2022.154664
Permanent Link	https://hdl.handle.net/11104/0334181

Number of the records: 1