- Precision of silicon oxynitride refractive-index profile retrieval us…
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Precision of silicon oxynitride refractive-index profile retrieval using optical characterization

  1. 1.
    Kanclíř, Vít - Václavík, Jan - Žídek, Karel
    Precision of silicon oxynitride refractive-index profile retrieval using optical characterization.
    Acta Physica Polonica A. Roč. 143, č. 3 (2021), s. 215-221. ISSN 0587-4246. E-ISSN 1898-794X
    R&D Projects: GA MŠMT(CZ) EF16_026/0008390
    Grant - others:GA AV ČR(CZ) StrategieAV21/17
    Program: StrategieAV
    OECD category: Optics (including laser optics and quantum optics)
    Impact factor: 0.725, year: 2021 ; AIS: 0.111, rok: 2021
    Method of publishing: Open access
    Result website:
    http://przyrbwn.icm.edu.pl/APP/PDF/140/app140z3p04.pdf

    DOI: https://doi.org/10.12693/APhysPolA.140.215
    https://hdl.handle.net/11104/0333383
Number of the records: 1  

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