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Precision of silicon oxynitride refractive-index profile retrieval using optical characterization
- 1.KANCLÍŘ, V., VÁCLAVÍK, J., ŽÍDEK, K. Precision of silicon oxynitride refractive-index profile retrieval using optical characterization. Acta Physica Polonica A. 2021, 143(3), 215-221. ISSN 0587-4246. E-ISSN 1898-794X. Available: https://doi.org/10.12693/APhysPolA.140.215.
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