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Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level
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SYSNO ASEP 0555695 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level Author(s) Arezki, Y. (FR)
Su, R. (GB)
Heikkinen, V. (FI)
Leprete, F. (FR)
Psota, Pavel (UFP-V) RID, ORCID
Bitou, Y. (JP)
Schober, C. (DE)
Mehdi-Souzani, C. (FR)
Alzahrani, B. A. M. (SA)
Zhang, X. (CN)
Kondo, Y. (JP)
Prüss, J. (DE)
Lédl, Vít (UFP-V) RID
Anwer, N. (FR)
Bouazizi, M. L. (SA)
Leach, R. (GB)
Nouira, H. (FR)Number of authors 17 Article number 1103 Source Title Sensors. - : MDPI
Roč. 21, č. 4 (2021), s. 1-19Number of pages 17 s. Language eng - English Country CH - Switzerland Keywords Aspheric and freeform optical elements ; Dimensional metrology ; Measured data evaluation ; Robust reference minimum zone (Hybrid Trust Region) fitting ; Ultra-high precision measuring machine ; Uncertainty Subject RIV BH - Optics, Masers, Lasers OECD category Optics (including laser optics and quantum optics) Method of publishing Open access Institutional support UFP-V - RVO:61389021 UT WOS 000624696400001 EID SCOPUS 85100456319 DOI 10.3390/s21041103 Annotation The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes. Workplace Institute of Plasma Physics Contact Vladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975 Year of Publishing 2022 Electronic address https://www.mdpi.com/1424-8220/21/4/1103
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