Tailoring properties of indium tin oxide thin films for their work in both electrochemical and optical label-free sensing systems

0552199 - FZÚ 2022 RIV CH eng J - Journal Article
Sezemsky, P. - Burnat, D. - Kratochvíl, J. - Wulff, H. - Kruth, A. - Lechowicz, K. - Janik, M. - Bogdanowicz, R. - Čada, Martin - Hubička, Zdeněk - Niedzialkowski, P. - Bialobrzeska, W. - Straňák, V. - Smietana, M.
Tailoring properties of indium tin oxide thin films for their work in both electrochemical and optical label-free sensing systems.
Sensors and Actuators B - Chemical. Roč. 343, Sep (2021), č. článku 130173. E-ISSN 0925-4005
Institutional support: RVO:68378271
Keywords : Indium tin oxide * sensor * optical sensing * HiPIMS * sputtering
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 9.221, year: 2021
Method of publishing: Open access

This work is devoted to the identification properties of indium tin oxide (ITO) thin films responsible for their possible application in combined optical and electrochemical label-free sensing systems offering enhanced functionalities. Since any post-processing would make it difficult to identify direct relation between deposition parameters and properties of the ITO films, especially when deposition on temperature-sensitive substrates is considered, the films were deposited using reactive high power impulse magnetron sputtering (HiPIMS) at low temperature and with no post-deposition annealing. We focused mainly on the impact of reactive gases, such as oxygen or nitrogen introduced to the process chamber, on control over plasma parameters and subsequently properties of the films. The properties of the films were investigated using X-ray diffractometry, spectroscopic ellipsometry, four-point probe, and cyclic voltammetry.
Permanent Link: http://hdl.handle.net/11104/0327330