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Quantification of stem images in high resolution sem for segmented and pixelated detectors
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SYSNO ASEP 0551125 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Quantification of stem images in high resolution sem for segmented and pixelated detectors Author(s) Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Paták, Aleš (UPT-D) RID, ORCID, SAI
Zouhar, Martin (UPT-D) ORCID, RID, SAI
Müllerová, Ilona (UPT-D) RID, SAI, ORCID
Fořt, Tomáš (UPT-D) RID, ORCID, SAI
Unčovský, M. (CZ)
Materna Mikmeková, Eliška (UPT-D) ORCID, RID, SAINumber of authors 7 Article number 71 Source Title Nanomaterials. - : MDPI
Roč. 12, č. 1 (2022)Number of pages 18 s. Publication form Online - E Language eng - English Country CH - Switzerland Keywords STEM segmented detector ; pixelated detector ; scanning electron microscopy ; Monte Carlo simulations ; ray tracing ; quantitative imaging Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Electrical and electronic engineering R&D Projects TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Method of publishing Open access Institutional support UPT-D - RVO:68081731 UT WOS 000758873700001 EID SCOPUS 85121682559 DOI 10.3390/nano12010071 Annotation The segmented semiconductor detectors for transmitted electrons in ultrahigh resolution scanning electron microscopes allow observing samples in various imaging modes. Typically, two standard modes of objective lens, with and without a magnetic field, differ by their resolution. If the beam deceleration mode is selected, then an electrostatic field around the sample is added. The trajectories of transmitted electrons are influenced by the fields below the sample. The goal of this paper is a quantification of measured images and theoretical study of the capability of the detector to collect signal electrons by its individual segments. Comparison of measured and ray-traced simulated data were difficult in the past. This motivated us to present a new method that enables better comparison of the two datasets at the cost of additional measurements, so-called calibration curves. Furthermore, we also analyze the measurements acquired using 2D pixel array detector (PAD) that provide a more detailed angular profile. We demonstrate that the radial profiles of STEM and/or 2D-PAD data are sensitive to material composition. Moreover, scattering processes are affected by thickness of the sample as well. Hence, comparing the two experimental and simulation data can help to estimate composition or the thickness of the sample. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2023 Electronic address https://www.mdpi.com/2079-4991/12/1/71
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