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The changes induced on oriented ZnO surface by inductively coupled plasma (ICP)

  1. 1.
    SYSNO0549949
    TitleThe changes induced on oriented ZnO surface by inductively coupled plasma (ICP)
    Author(s) Remeš, Zdeněk (FZU-D) RID, ORCID
    Artemenko, Anna (FZU-D) RID, ORCID
    Ukraintsev, Egor (FZU-D) RID, ORCID
    Rezek, B. (CZ)
    Poruba, A. (CZ)
    Hsu, H.S. (TW)
    Mičová, J. (SK)
    Source Title E-MRS Spring Meeting - Symposia & program Section N Current trends in optical and X-ray metrology of advanced materials for nanoscale devices VI. - Strasbourg : European Materials Research Society (E-MRS), 2021
    Conference 2021 Spring Meeting of the European Materials Research Society (E-MRS), 31.05.2021 - 03.06.2021, Virtual
    Document TypeAbstrakt
    Grant CZ.02.1.01/0.0/0.0/16_019/0000760, XE - EU countries
    EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    SAV-21-09, CZ - Czech Republic, SK - Slovakia
    GC19-02858J GA ČR - Czech Science Foundation (CSF)
    LM2018110 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    StrategieAV21/6, CZ - Czech Republic
    Institutional supportFZU-D - RVO:68378271
    Languageeng
    CountryFR
    Keywords ICP * ZnO * XPS * AFM
    Permanent Linkhttp://hdl.handle.net/11104/0325863
     
Number of the records: 1  

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