Number of the records: 1
The changes induced on oriented ZnO surface by inductively coupled plasma (ICP)
- 1.
SYSNO 0549949 Title The changes induced on oriented ZnO surface by inductively coupled plasma (ICP) Author(s) Remeš, Zdeněk (FZU-D) RID, ORCID
Artemenko, Anna (FZU-D) RID, ORCID
Ukraintsev, Egor (FZU-D) RID, ORCID
Rezek, B. (CZ)
Poruba, A. (CZ)
Hsu, H.S. (TW)
Mičová, J. (SK)Source Title E-MRS Spring Meeting - Symposia & program Section N Current trends in optical and X-ray metrology of advanced materials for nanoscale devices VI. - Strasbourg : European Materials Research Society (E-MRS), 2021 Conference 2021 Spring Meeting of the European Materials Research Society (E-MRS), 31.05.2021 - 03.06.2021, Virtual Document Type Abstrakt Grant CZ.02.1.01/0.0/0.0/16_019/0000760, XE - EU countries EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic SAV-21-09, CZ - Czech Republic, SK - Slovakia GC19-02858J GA ČR - Czech Science Foundation (CSF) LM2018110 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) StrategieAV21/6, CZ - Czech Republic Institutional support FZU-D - RVO:68378271 Language eng Country FR Keywords ICP * ZnO * XPS * AFM Permanent Link http://hdl.handle.net/11104/0325863
Number of the records: 1