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Trajectory displacement in a multi beam scanning electron microscope
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SYSNO ASEP 0549399 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Trajectory displacement in a multi beam scanning electron microscope Author(s) Stopka, Jan (UPT-D) ORCID, SAI
Zuidema, W. (NL)
Kruit, P. (NL)Number of authors 3 Article number 113223 Source Title Ultramicroscopy. - : Elsevier - ISSN 0304-3991
Roč. 223, April (2021)Number of pages 8 s. Publication form Print - P Language eng - English Country NL - Netherlands Keywords Trajectory displacement ; Multi-beam electron microscope ; Coulomb interactions ; Slice method ; Electron optics Subject RIV BH - Optics, Masers, Lasers OECD category Optics (including laser optics and quantum optics) R&D Projects TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Open access Institutional support UPT-D - RVO:68081731 UT WOS 000632279200007 EID SCOPUS 85100426261 DOI 10.1016/j.ultramic.2021.113223 Annotation The analytical theory of statistical Coulomb interactions allows to determine the trajectory displacement in a single rotationally symmetrical beam with well-behaved spatial and angular particle distributions. This can be used to estimate the trajectory displacement in a multi-beam system using the so called fully-filled segment approximation. This approach predicts full compensation of trajectory displacement for a specific setup of the system. We show that this prediction is not consistent with Monte Carlo simulations and we develop a new approach to the calculation, showing that two independent trajectory displacement contributions are present in a multi-beam system. We support this calculation with Monte Carlo simulations as well as with experimental data from a multi-beam system. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2022 Electronic address https://www.sciencedirect.com/science/article/pii/S030439912100019X
Number of the records: 1