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In situ optical and electrical analysis of transient plasmas generated by ns-laser ablation for Ag nanostructured film production
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SYSNO ASEP 0546676 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title In situ optical and electrical analysis of transient plasmas generated by ns-laser ablation for Ag nanostructured film production Author(s) Irimiciuc, Stefan Andrei (FZU-D) ORCID
Chertopalov, Sergii (FZU-D) ORCID
Bulíř, Jiří (FZU-D) RID, ORCID, SAI
Fekete, Ladislav (FZU-D) RID, ORCID
Vondráček, Martin (FZU-D) RID, ORCID
Novotný, Michal (FZU-D) RID, ORCID, SAI
Craciun, V. (RO)
Lančok, Ján (FZU-D) RID, ORCIDNumber of authors 8 Article number 110528 Source Title Vacuum. - : Elsevier - ISSN 0042-207X
Roč. 193, Nov. (2021)Number of pages 10 s. Language eng - English Country GB - United Kingdom Keywords Langmuir probe ; optical emission spectroscopy ; perturbative probe ; plasma dynamics ; thickness profile ; Ag nanoparticles ; laser ablation Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) R&D Projects EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA20-21069S GA ČR - Czech Science Foundation (CSF) Method of publishing Limited access Institutional support FZU-D - RVO:68378271 UT WOS 000702522400003 EID SCOPUS 85112483940 DOI https://doi.org/10.1016/j.vacuum.2021.110528 Annotation The continuous effort for transitioning pulsed laser deposition (PLD) technique from an experimental tool into an industrial one can be sustained by the use of complex tools for in situ real-time monitoring of the deposition process. Langmuir Probe (LP) and optical emission spectroscopy (OES) measurements were used for plasma monitoring during PLD of silver films under various Ar pressure conditions. The LP measurements revealed a multi-structured distribution of the ions, which was strongly influenced by the increase of Ar pressure. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2022 Electronic address https://doi.org/10.1016/j.vacuum.2021.110528
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