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Sputtered nanostructured interfaces used for biochemical sensing
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SYSNO ASEP 0546599 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Sputtered nanostructured interfaces used for biochemical sensing Author(s) Tvarožek, V. (SK)
Szabó, Ondrej (FZU-D) ORCID, RIDNumber of authors 2 Source Title Proceedings of Microelectronics (MIEL 2021). - Danvers : IEEE, 2021 - ISBN 978-1-6654-4526-9 Pages s. 189-192 Number of pages 4 s. Publication form Online - E Action International Conference On Microelectronics (MIEL 2021) /32./ Event date 12.09.2021 - 14.09.2021 VEvent location Niš Country RS - Serbia Event type WRD Language eng - English Country US - United States Keywords localized surface plasmon resonance ; non-continuous island like Au films ; electrochemical impedance spectroscopy Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Optics (including laser optics and quantum optics) R&D Projects EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 EID SCOPUS 85118461859 DOI 10.1109/MIEL52794.2021.9569179 Annotation In this paper we demonstrate the forming of sensoric nanostructures by sputtering without using masking and lithography.A specific sequential (cyclic) sputtering technology for preparation of non-continuous island like Au films (nanoisland arrays) was developed. Applications of nanoisland arrays are presented in the Localized Surface Plasmon Resonance sensing and together with interdigitated array of electrodes in the Electrochemical Impedance Spectroscopy sensing. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2022
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