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Growth defects in WC:H layers for tribological applications
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SYSNO ASEP 0539174 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Growth defects in WC:H layers for tribological applications Author(s) Mates, Tomáš (FZU-D) RID, ORCID
Polášek, J. (CZ)
Mareš, P. (CZ)
Dubau, M. (CZ)
Vetushka, Aliaksi (FZU-D) RID, ORCID
Ledinský, Martin (FZU-D) RID, ORCID, SAI
Fejfar, Antonín (FZU-D) RID, ORCID, SAI
Vyskočil, J. (CZ)Number of authors 8 Article number 109372 Source Title Vacuum. - : Elsevier - ISSN 0042-207X
Roč. 178, Aug (2020), s. 1-7Number of pages 7 s. Language eng - English Country GB - United Kingdom Keywords DLC ; PACVD ; AFM ; SEM ; FIB ; Raman Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) R&D Projects EF16_026/0008382 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LM2018110 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) TH03020004 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Method of publishing Limited access Institutional support FZU-D - RVO:68378271 UT WOS 000541439800003 EID SCOPUS 85085735198 DOI 10.1016/j.vacuum.2020.109372 Annotation Friction and wear resistance are important factors of all mechanical tools and machines used in industry. Diamond-like carbon (DLC) and derived metal-carbon composite (WC:H) layers are known to substantially improve both of these factors and frequently find their use in tribological applications. Microscopic analysis of the WC:H layers shows a frequent occurrence of a certain type of structural defects that have major influence on the layer roughness. The defects are conically shaped objects penetrating the layer all the way down to the substrate, covered with a spherical cap on the top. The lateral dimensions of the defects vary from ~100 nm to ~1 um. To study these defects we prepared several layers at various conditions and analysed them by SEM, FIB, EDX, AFM and Raman spectroscopy. We will discuss the structure of the defects and influence of the preparation conditions on their growth and on their occurence in the layer.
Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2021 Electronic address https://doi.org/10.1016/j.vacuum.2020.109372
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