Number of the records: 1
Plasma diagnostics in reactive high-power impulse magnetron sputtering system working in Ar + H.sub.2./sub.S gas mixture
- 1.Hubička, Zdeněk - Čada, Martin - Kapran, Anna - Olejníček, Jiří - Kšírová, Petra - Zanáška, Michal - Adámek, Petr - Tichý, M.
Plasma diagnostics in reactive high-power impulse magnetron sputtering system working in Ar + H2S gas mixture.
Coatings. Roč. 10, č. 3 (2020), s. 1-17, č. článku 246. E-ISSN 2079-6412
OECD category: Coating and films
Impact factor: 2.881, year: 2020
Method of publishing: Open access
http://hdl.handle.net/11104/0312196
Number of the records: 1