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Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration
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SYSNO ASEP 0525112 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration Author(s) Skoupý, Radim (UPT-D) RID, ORCID, SAI
Fořt, Tomáš (UPT-D) RID, ORCID, SAI
Krzyžánek, Vladislav (UPT-D) RID, ORCID, SAINumber of authors 3 Article number 332 Source Title Nanomaterials. - : MDPI
Roč. 10, č. 2 (2020)Number of pages 11 s. Publication form Print - P Language eng - English Country CH - Switzerland Keywords SEM ; quantitative imaging ; back-scattered electrons ; standardless calibration ; electron mirror ; sample bias ; Monte Carlo simulation ; thin coating layers Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Nano-materials (production and properties) R&D Projects GA17-15451S GA ČR - Czech Science Foundation (CSF) FV30271 GA MPO - Ministry of Industry and Trade (MPO) Method of publishing Open access Institutional support UPT-D - RVO:68081731 UT WOS 000522456300151 EID SCOPUS 85079696006 DOI 10.3390/nano10020332 Annotation The thickness of electron transparent samples can be measured in an electron microscope using several imaging techniques like electron energy loss spectroscopy (EELS) or quantitative scanning transmission electron microscopy (STEM). We extrapolate this method for using a back-scattered electron (BSE) detector in the scanning electron microscope (SEM). This brings the opportunity to measure the thickness not just of the electron transparent samples on TEM mesh grids, but, in addition, also the thickness of thin films on substrates. Nevertheless, the geometry of the microscope and the BSE detector poses a problem with precise calibration of the detector. We present a simple method which can be used for such a type of detector calibration that allows absolute (standardless) measurement of thickness, together with a proof of the method on test samples. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2021 Electronic address https://www.mdpi.com/2079-4991/10/2/332
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