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Ion sputtering for preparation of thin MAX and MXene phases
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SYSNO ASEP 0523928 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Ion sputtering for preparation of thin MAX and MXene phases Author(s) Vacík, Jiří (UJF-V) RID, ORCID, SAI
Horák, Pavel (UJF-V) RID, ORCID
Bakardjieva, Snejana (UACH-T) SAI, RID, ORCID
Bejšovec, Václav (UJF-V) RID
Ceccio, Giovanni (UJF-V) ORCID, RID, SAI
Cannavó, Antonino (UJF-V) ORCID, SAI
Torrisi, Alfio (UJF-V) RID, ORCID
Lavrentiev, Vasyl (UJF-V) RID, ORCID, SAI
Klie, R. (US)Number of authors 9 Source Title Radiation Effects and Defects in Solids. - : Taylor & Francis - ISSN 1042-0150
Roč. 175, 1-2 (2020), s. 177-189Number of pages 13 s. Publication form Print - P Language eng - English Country GB - United Kingdom Keywords ion beam sputtering ; low energy ion facility ; thin films ; MAX and MXenes phases Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) Subject RIV - cooperation Institute of Inorganic Chemistry - Inorganic Chemistry R&D Projects GA18-21677S GA ČR - Czech Science Foundation (CSF) Method of publishing Limited access Institutional support UJF-V - RVO:61389005 ; UACH-T - RVO:61388980 UT WOS 000517368700017 EID SCOPUS 85081015870 DOI 10.1080/10420150.2020.1718142 Annotation Thin films of MAX and MXene phases were prepared by ion beam sputtering followed by thermal annealing in vacuum. For this purpose, a Low Energy Ion Facility (LEIF) using heavy ions for target irradiation was developed, and the DC ion beam sputtering method was implemented. The process for preparing MAX and MXene thin composites consists of two steps. First step: bombarding the elemental targets with low-energy ions (either all targets together, each with the corresponding size, or each target separately and repeatedly), it results in synthesis of either homogeneous layers of mixed phases or multilayer arrays of individual phases. Second step: thermal annealing under vacuum with a suitable temperature and time to induce a diffusion process, mutual phase interaction and finally the formation of MAX or MXene composites with the desired structure. After installation of the LEIF system and the introduction of the two-step method, i.e. DC ion sputtering with subsequent thermal processing, the first Ti-based MAX and MXene carbides, Ti2SnC and Ti2C, in thin films of composites were prepared and analyzed. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2021 Electronic address https://doi.org/10.1080/10420150.2020.1718142
Number of the records: 1