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The effect of magnetic field strength and geometry on the deposition rate and ionized flux fraction in the HiPIMS discharge
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SYSNO 0519372 Title The effect of magnetic field strength and geometry on the deposition rate and ionized flux fraction in the HiPIMS discharge Author(s) Hajihoseini, H. (IS)
Čada, Martin (FZU-D) RID, ORCID, SAI
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Ünaldi, S. (FR)
Raadu, M.A. (SE)
Brenning, N. (FR)
Gudmundsson, J.T. (IS)
Lundin, D. (FR)Source Title Plasma. Roč. 2, č. 2 (2019), s. 201-221. - : MDPI Document Type Článek v odborném periodiku Grant CZ.02.1.01/0.0/0.0/16_019/0000760, XE - EU countries EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic GA19-00579S GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 Language eng Country CH Keywords ionized physical vapor deposition * magnetron sputtering * high power impulse magnetron sputtering (HiPIMS) * ionized flux fraction * deposition rate URL http://hdl.handle.net/11104/0304364 Permanent Link http://hdl.handle.net/11104/0304364 File Download Size Commentary Version Access 0519372.pdf 0 1.2 MB CC licence Publisher’s postprint open-access
Number of the records: 1