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The effect of magnetic field strength and geometry on the deposition rate and ionized flux fraction in the HiPIMS discharge

  1. 1.
    Hajihoseini, H. - Čada, Martin - Hubička, Zdeněk - Ünaldi, S. - Raadu, M.A. - Brenning, N. - Gudmundsson, J.T. - Lundin, D.
    The effect of magnetic field strength and geometry on the deposition rate and ionized flux fraction in the HiPIMS discharge.
    Plasma. Roč. 2, č. 2 (2019), s. 201-221. E-ISSN 2571-6182
    OECD category: Fluids and plasma physics (including surface physics)
    Method of publishing: Open access
    http://hdl.handle.net/11104/0304364
Number of the records: 1  

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