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The effect of magnetic field strength and geometry on the deposition rate and ionized flux fraction in the HiPIMS discharge
- 1.HAJIHOSEINI, H., ČADA, Martin, HUBIČKA, Zdeněk, ÜNALDI, S., RAADU, M.A., BRENNING, N., GUDMUNDSSON, J.T., LUNDIN, D. The effect of magnetic field strength and geometry on the deposition rate and ionized flux fraction in the HiPIMS discharge. Plasma. 2019, 2(2), 201-221. E-ISSN 2571-6182. Available: doi: 10.3390/plasma2020015.
Number of the records: 1