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Comparison of three focus sensors for optical topography measurement of rough surfaces
- 1.ŠARBORT, Martin, HOLÁ, Miroslava, PAVELKA, Jan, SCHOVÁNEK, P., ŘEŘUCHA, Šimon, OULEHLA, Jindřich, FOŘT, Tomáš, LAZAR, Josef. Comparison of three focus sensors for optical topography measurement of rough surfaces. Optics Express. 2019, 27(23), 33459-33473. ISSN 1094-4087. Available: doi: 10.1364/OE.27.033459.
Number of the records: 1