0511050 - FZÚ 2020 RIV CH eng J - Journal Article
Stachiv, Ivo - Gan, L.F.
Simple non-destructive method of ultrathin film material properties and generated internal stress determination using microcantilevers immersed in air.
Coatings. Roč. 9, č. 8 (2019), s. 1-14, č. článku 486. E-ISSN 2079-6412
R&D Projects: GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : thin film * atomic layer deposition * nanomechanics * Young's modulus * shear modulus * resonant frequency * Q-factor * microcantilevers * internal stress
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 2.436, year: 2019
Method of publishing: Open access

Recent progress in nanotechnology has enabled to design the advanced functional micro-/nanostructures utilizing the unique properties of ultrathin films. To ensure these structures can reach the expected functionality, it is necessary to know the density, generated internal stress and the material properties of prepared films.

Permanent Link: http://hdl.handle.net/11104/0301395