Technological possibilities and vacuum systems for deposition of Si:H thin films with embedded nanoparticles

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SYSNO	0502002
Title	Technological possibilities and vacuum systems for deposition of Si:H thin films with embedded nanoparticles
Author(s)	Stuchlík, Jiří (FZU-D)_{RID, ORCID} Stuchlíková, The-Ha (FZU-D)_{RID, ORCID} Fajgar, Radek (UCHP-M)_{RID, ORCID, SAI} Kupčík, Jaroslav (UCHP-M)_{RID, ORCID, SAI} Remeš, Zdeněk (FZU-D)_{RID, ORCID}
Source Title	Book of Abstracts of the 28th Joint Seminar Development of Materials Science in Research and Education. S. 53-53. - Praha : Institute of Physics of the Czech Academy of Sciences, 2018 / Kožíšek Z. ; Král R. ; Zemenová P.
Conference	Joint Seminar Development of Materials Science in Research and Education /28./, 03.09.2018 - 07.09.2018, Pavlov
Document Type	Abstrakt
Grant	LTC17029 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
Institutional support	FZU-D - RVO:68378271 ; UCHP-M - RVO:67985858
Language	eng
Country	CZ
Keywords	a-Si:H * PIN diode * thin films * nanoparticles
Permanent Link	http://hdl.handle.net/11104/0293962

Number of the records: 1