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STEM modes in SEM
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SYSNO ASEP 0494365 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title STEM modes in SEM Author(s) Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Paták, Aleš (UPT-D) RID, ORCID, SAI
Mikmeková, Eliška (UPT-D) RID
Mika, Filip (UPT-D) RID, SAI, ORCID
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDNumber of authors 5 Source Title Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. - Brno : Institute of Scientific Instruments The Czech Academy of Sciences, 2018 - ISBN 978-80-87441-23-7 Pages s. 40-41 Number of pages 2 s. Publication form Print - P Action Recent Trends in Charged Particle Optics and Surface Physics Instrumentation Event date 04.06.2018 - 08.06.2018 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords SEM ; STEM Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Electrical and electronic engineering R&D Projects TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 UT WOS 000450591400014 Annotation The segmented semiconductor STEM detector in the Magellan 400 FEG SEM microscope
(https://www.fei.com/) is used to detect transmitted electrons (TEs) and allows observing
samples in four imaging modes. Two modes of objective lens, namely high resolution (HR)
and ultra-high resolution (UHR), differ by their resolution and by the presence or absence of
a magnetic field around the sample. If the beam deceleration (BD) mode is chosen, then
an electrostatic field around the sample is added and two further microscope modes HR + BD
and UHR + BD, become available. Trajectories of TEs are studied with regard to their angular
and energy distribution in each mode in this work.
Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2019
Number of the records: 1