Magnetron sputtered Hf-B-Si-C-N films with controlled electrical conductivity and optical transparency, and with ultrahigh oxidation resistance

Number of the records: 1

1.

SYSNO	0489160
Title	Magnetron sputtered Hf-B-Si-C-N films with controlled electrical conductivity and optical transparency, and with ultrahigh oxidation resistance
Author(s)	Šímová, V. (CZ) Vlček, J. (CZ) Zuzjaková, Š. (CZ) Houška, J. (CZ) Shen, Y. (US) Jiang, J. C. (US) Meletis, E. I. (US) Peřina, Vratislav (UJF-V) [ONF]_RID
Source Title	Thin Solid Films. Roč. 653, č. 5 (2018), s. 333-340. - : Elsevier
Document Type	Článek v odborném periodiku
Grant	LM2015056 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UJF-V - RVO:61389005
Language	eng
Country	CH
Keywords	Hf-B-Si-C-N films * pulsed reactive magnetron sputtering * electrical conductivitiy * optical transparency * high-temperature oxidation resistance
Cooperating institutions	Západočeská univerzita v Plzni (Czech Republic)
Permanent Link	http://hdl.handle.net/11104/0283663

Number of the records: 1