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Magnetron sputtered Hf-B-Si-C-N films with controlled electrical conductivity and optical transparency, and with ultrahigh oxidation resistance

  1. 1.
    Šímová, V. - Vlček, J. - Zuzjaková, Š. - Houška, J. - Shen, Y. - Jiang, J. C. - Meletis, E. I. - Peřina, Vratislav
    Magnetron sputtered Hf-B-Si-C-N films with controlled electrical conductivity and optical transparency, and with ultrahigh oxidation resistance.
    Thin Solid Films. Roč. 653, č. 5 (2018), s. 333-340. ISSN 0040-6090. E-ISSN 1879-2731
    OECD category: Nuclear physics
    Impact factor: 1.888, year: 2018
    http://hdl.handle.net/11104/0283663
Number of the records: 1  

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