Magnetron sputtered Hf-B-Si-C-N films with controlled electrical conductivity and optical transparency, and with ultrahigh oxidation resistance

ŠÍMOVÁ, V., VLČEK, J., ZUZJAKOVÁ, Š., HOUŠKA, J., SHEN, Y., JIANG, J. C., MELETIS, E. I., PEŘINA, V. Magnetron sputtered Hf-B-Si-C-N films with controlled electrical conductivity and optical transparency, and with ultrahigh oxidation resistance. Thin Solid Films. 2018, 653(5), 333-340. ISSN 0040-6090. E-ISSN 1879-2731. Available: doi: 10.1016/j.tsf.2018.03.064