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Supersensitive surface imaging with very slow secondary electrons
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SYSNO ASEP 0482727 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Supersensitive surface imaging with very slow secondary electrons Author(s) Mikmeková, Šárka (UPT-D) RID, SAI, ORCID
Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Tsukiori, D. (JP)
Arai, R. (JP)
Takano, M. (JP)
Okuda, K. (JP)
Müllerová, Ilona (UPT-D) RID, SAI, ORCID
Frank, Luděk (UPT-D) RID, SAI, ORCIDNumber of authors 8 Source Title The 3rd East-Asia Microscopy Conference. Abstract Proceeding. - Seoul : Korean Society of Microscopy, 2017 Number of pages 1 s. Publication form Print - P Action East-Asia Microscopy Conference /3./ Event date 07.11.2017 - 10.11.2017 VEvent location Busan Country KR - Korea, Republic of Event type WRD Language eng - English Country KR - Korea, Republic of Keywords supersensitive surface ; very slow secondary electrons Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering OECD category Materials engineering Institutional support UPT-D - RVO:68081731 Annotation Secondary electron (SE) imaging is one of the most commonly used mode in a scanning electron microscope (SEM). Recently, the modern SEMs are equipped with highly sophisticated multiple detection systems, which enable sharing of the SEs by two or even three detectors. The SEs become effectively separated based on their initial kinetic energy and emission angle. The filtered SE images give additional information of the specimen and its surface. Figure 1 shows the SE micrographs simultaneously collected by two in-column detectors and a conventional out-lens detector. Obviously, the images collected by the in-column detectors exhibit sensitivity on surface potential as a consequence of the low kinetic energy SEs detection. The out-lens image (SE2) shows the topographic contrast, which is carried by the high energy SEs. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2018
Number of the records: 1