Number of the records: 1  

Supersensitive surface imaging with very slow secondary electrons

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    SYSNO ASEP0482727
    Document TypeA - Abstract
    R&D Document TypeThe record was not marked in the RIV
    R&D Document TypeNení vybrán druh dokumentu
    TitleSupersensitive surface imaging with very slow secondary electrons
    Author(s) Mikmeková, Šárka (UPT-D) RID, SAI, ORCID
    Konvalina, Ivo (UPT-D) RID, ORCID, SAI
    Tsukiori, D. (JP)
    Arai, R. (JP)
    Takano, M. (JP)
    Okuda, K. (JP)
    Müllerová, Ilona (UPT-D) RID, SAI, ORCID
    Frank, Luděk (UPT-D) RID, SAI, ORCID
    Number of authors8
    Source TitleThe 3rd East-Asia Microscopy Conference. Abstract Proceeding. - Seoul : Korean Society of Microscopy, 2017
    Number of pages1 s.
    Publication formPrint - P
    ActionEast-Asia Microscopy Conference /3./
    Event date07.11.2017 - 10.11.2017
    VEvent locationBusan
    CountryKR - Korea, Republic of
    Event typeWRD
    Languageeng - English
    CountryKR - Korea, Republic of
    Keywordssupersensitive surface ; very slow secondary electrons
    Subject RIVJA - Electronics ; Optoelectronics, Electrical Engineering
    OECD categoryMaterials engineering
    Institutional supportUPT-D - RVO:68081731
    AnnotationSecondary electron (SE) imaging is one of the most commonly used mode in a scanning electron microscope (SEM). Recently, the modern SEMs are equipped with highly sophisticated multiple detection systems, which enable sharing of the SEs by two or even three detectors. The SEs become effectively separated based on their initial kinetic energy and emission angle. The filtered SE images give additional information of the specimen and its surface. Figure 1 shows the SE micrographs simultaneously collected by two in-column detectors and a conventional out-lens detector. Obviously, the images collected by the in-column detectors exhibit sensitivity on surface potential as a consequence of the low kinetic energy SEs detection. The out-lens image (SE2) shows the topographic contrast, which is carried by the high energy SEs.
    WorkplaceInstitute of Scientific Instruments
    ContactMartina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
    Year of Publishing2018
Number of the records: 1  

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