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Simulations and measurements in scanning electron microscopes at low electron energy
- 1.0467245 - ÚPT 2017 RIV US eng J - Journal Article
Walker, C. - Frank, Luděk - Müllerová, Ilona
Simulations and measurements in scanning electron microscopes at low electron energy.
Scanning. Roč. 38, č. 6 (2016), s. 802-818. ISSN 0161-0457. E-ISSN 1932-8745
R&D Projects: GA TA ČR(CZ) TE01020118; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
EU Projects: European Commission(XE) 606988 - SIMDALEE2
Institutional support: RVO:68081731
Keywords : Monte Carlo modeling * scanned probe * computer simulation * electron-solid interactions * surface analysis
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.345, year: 2016 ; AIS: 0.399, rok: 2016
DOI: https://doi.org/10.1002/sca.21330
Permanent Link: http://hdl.handle.net/11104/0265392
Number of the records: 1